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@ARTICLE{Tryus:862552,
      author       = {Tryus, Maksym and Nikolaev, Konstantin V. and Makhotkin,
                      Igor A. and Schubert, Jürgen and Kibkalo, Lidia and
                      Danylyuk, Serhiy and Giglia, Angelo and Nicolosi,
                      Piergiorgio and Juschkin, Larissa},
      title        = {{O}ptical and structural characterization of orthorhombic
                      {L}a{L}u{O}3 using extreme ultraviolet reflectometry},
      journal      = {Thin solid films},
      volume       = {680},
      issn         = {0040-6090},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {FZJ-2019-02846},
      pages        = {94 - 101},
      year         = {2019},
      abstract     = {A thin orthorhombic LaLuO film, grown on SrTiO substrate by
                      pulsed laser deposition, is characterized using multi-angle
                      spectralextreme ultraviolet reflectometry (EUVR). Layer
                      structure parameters and optical constants of LaLuO are
                      determined simultaneously byfitting angular reflectivity
                      curves in a wide spectral range (70–200 eV). From
                      near-edge optical constant analysis, La:Lu
                      stoichiometryratio and the film density are derived. Sample
                      structure is additionally analyzed using XRR, AFM and TEM
                      methods. EUVR as a methodof structural characterization is
                      discussed in comparison with XRR. Correlation error analysis
                      of the layer structure parameters,obtained from independent
                      EUVR and XRR fits, is presented.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {660},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000467389900015},
      doi          = {10.1016/j.tsf.2019.04.037},
      url          = {https://juser.fz-juelich.de/record/862552},
}