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| 001 | 862552 | ||
| 005 | 20210130001446.0 | ||
| 024 | 7 | _ | |a 10.1016/j.tsf.2019.04.037 |2 doi |
| 024 | 7 | _ | |a 0040-6090 |2 ISSN |
| 024 | 7 | _ | |a 1879-2731 |2 ISSN |
| 024 | 7 | _ | |a WOS:000467389900015 |2 WOS |
| 037 | _ | _ | |a FZJ-2019-02846 |
| 082 | _ | _ | |a 660 |
| 100 | 1 | _ | |a Tryus, Maksym |0 P:(DE-HGF)0 |b 0 |e Corresponding author |
| 245 | _ | _ | |a Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry |
| 260 | _ | _ | |a Amsterdam [u.a.] |c 2019 |b Elsevier |
| 336 | 7 | _ | |a article |2 DRIVER |
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| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
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| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 520 | _ | _ | |a A thin orthorhombic LaLuO film, grown on SrTiO substrate by pulsed laser deposition, is characterized using multi-angle spectralextreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO are determined simultaneously byfitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometryratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a methodof structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters,obtained from independent EUVR and XRR fits, is presented. |
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| 700 | 1 | _ | |a Nikolaev, Konstantin V. |0 P:(DE-HGF)0 |b 1 |
| 700 | 1 | _ | |a Makhotkin, Igor A. |0 P:(DE-HGF)0 |b 2 |
| 700 | 1 | _ | |a Schubert, Jürgen |0 P:(DE-Juel1)128631 |b 3 |
| 700 | 1 | _ | |a Kibkalo, Lidia |0 P:(DE-Juel1)169107 |b 4 |
| 700 | 1 | _ | |a Danylyuk, Serhiy |0 P:(DE-HGF)0 |b 5 |
| 700 | 1 | _ | |a Giglia, Angelo |0 P:(DE-HGF)0 |b 6 |
| 700 | 1 | _ | |a Nicolosi, Piergiorgio |0 P:(DE-HGF)0 |b 7 |
| 700 | 1 | _ | |a Juschkin, Larissa |0 P:(DE-Juel1)157957 |b 8 |
| 773 | _ | _ | |a 10.1016/j.tsf.2019.04.037 |g Vol. 680, p. 94 - 101 |0 PERI:(DE-600)1482896-0 |p 94 - 101 |t Thin solid films |v 680 |y 2019 |x 0040-6090 |
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