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@PHDTHESIS{Tromm:862553,
author = {Tromm, Thomas Carl Ulrich},
title = {{H}igh-k rare-earth oxides on {G}a{N} and ferroelectric
properties of hafnia based thin films},
school = {RWTH Aachen University},
type = {Dissertation},
reportid = {FZJ-2019-02847},
pages = {133 p.},
year = {2019},
note = {Dissertation, RWTH Aachen University, 2014},
abstract = {The continuous improvement of the transistors is the basis
for the increase of computing power. For enhanced
metal-oxide-semiconductor (MOS)
field-effect-transistors(FETs) and other devices suitable
gate dielectrics are required, that exhibit a high relative
permittivity, good insulating properties like a large band
gap, and a goodlayer quality. Additionally, new device
structures like negative capacitance FET (NCFET) are
developed.In this thesis the ternary rare-earth oxides
GdScO3 (GSO), LaLuO3 (LLO) and SmScO3 (SSO) are grown on GaN
by pulsed laser deposition (PLD). Those oxidesreveal a
hexagonal phase, that has been discovered few years ago. The
oxides have a large lattice mismatch to the GaN and are not
at thermodynamic equilibrium,according to ab-initio
calculations. The hexagonal ternary rare-earth oxides reveal
a permittivity of 30 (GSO) and of 32 (LLO) and a bandgap
above 5 eV. To understandthe growth mechanism of the
rare-earth oxides, the layer and especially the interface
are investigated. First of all hexagonal GSO reveals a
decomposition of Scand Gd at the interface, so that it
exhibits twice as much Sc than Gd, which reduces the length
of the in-plane axis of the GSO and subsequently the lattice
mismatch.Secondly, the grains are tilted in-plane, revealing
a fibre texture with the c-axis as fibre axis perpendicular
to the interface. Thirdly, the distance of the lattice
planesat the interface is enhanced, revealing a distance of
3.1 Å. The SSO also reveals a fibre texture and an enhanced
interface distance, thought the decomposition of theSm and
the Sc occurs in places. The hexagonal LLO reveals a fibre
texture and a small decomposition.For a novel NCFET a
ferroelectric is placed in between the gate metal and the
oxide of a MOSFET. The ferroelectric should exhibit a
negative capacitance and inthis way cause a voltage
amplification, resulting in a subthreshold slope (SS) below
60 mV/dec. PLD grown ferroelectric HfO2 with $5\%$ Gd and
HfO2 with $5\%$ Lu(HfLuO) reveal a remanent polarization of
12 μC/cm2, while the HfO2 with $5\%$ Y, grown by atomic
layer deposition, reveals one of 20 μC/cm2 and a steeper
hysteresis.HfLuO exhibits a pinched hysteresis at the
initial state, if the sample is annealed at 500 °C, which
could be related to an antiferroelectric phase. At an
annealingtemperature of 700 °C the HfLuO layer becomes
ferroelectric.},
cin = {PGI-9},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)11},
url = {https://juser.fz-juelich.de/record/862553},
}