%0 Conference Paper
%A Marchuk, O.
%A Dickheuer, S.
%A Ertmer, S.
%A Krasikov, Yu.
%A Mertens, Ph.
%A Göths, B.
%A Kreter, A.
%T In-situ determination of surface characteristics by optical emission spectroscopy
%M FZJ-2019-03879
%D 2019
%B International Conference on Research and Applications of Plasmas, Plasma-2019
%C 15 Jul 2019 - 19 Jul 2019, Opole University (Opole)
Y2 15 Jul 2019 - 19 Jul 2019
M2 Opole University, Opole
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/863916