Hauptseite > Externe Publikationen > Vita Publikationen > Modeling of metastable phase formation for sputtered Ti1-xAlxN thin films |
Journal Article | FZJ-2019-04058 |
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2019
Elsevier Science85412
Amsterdam [u.a.]
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Please use a persistent id in citations: doi:10.1016/j.actamat.2018.12.004
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