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@INPROCEEDINGS{Uhlenbruck:865847,
author = {Uhlenbruck, Sven},
title = {{S}puttertechnologien für innovative {B}atteriekonzepte},
reportid = {FZJ-2019-05136},
year = {2019},
month = {Oct},
date = {2019-10-08},
organization = {Vakuum und Plasma 2019, Dresden
(Germany), 8 Oct 2019 - 10 Oct 2019},
subtyp = {Invited},
cin = {IEK-1 / IEK-12},
cid = {I:(DE-Juel1)IEK-1-20101013 / I:(DE-Juel1)IEK-12-20141217},
pnm = {131 - Electrochemical Storage (POF3-131)},
pid = {G:(DE-HGF)POF3-131},
typ = {PUB:(DE-HGF)6},
url = {https://juser.fz-juelich.de/record/865847},
}