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@ARTICLE{Khler:865947,
author = {Köhler, Malte and Pomaska, Manuel and Zamchiy, Alexandr
and Lambertz, Andreas and Duan, Weiyuan and Lentz, Florian
and Li, Shenghao and Kirchartz, Thomas and Finger, Friedhelm
and Rau, Uwe and Ding, Kaining},
title = {{O}ptimization of {T}ransparent {P}assivating {C}ontact for
{C}rystalline {S}ilicon {S}olar {C}ells},
journal = {IEEE journal of photovoltaics},
volume = {10},
number = {1},
issn = {2156-3381},
address = {New York, NY},
publisher = {IEEE},
reportid = {FZJ-2019-05213},
pages = {46-53},
year = {2020},
abstract = {A highly transparent front contact layer system for
crystalline silicon (c-Si) solar cells is investigated and
optimized. This contact system consists of a wet-chemically
grown silicon tunnel oxide, a hydrogenated microcrystalline
silicon carbide [SiO 2 /µc-SiC:H( n )] prepared by hot-wire
chemical vapor deposition (HWCVD), and a sputter-deposited
indium doped tin oxide. Because of the exclusive use of very
high bandgap materials, this system is more transparent for
the solar light than state of the art amorphous (a-Si:H) or
polycrystalline silicon contacts. By investigating the
electrical conductivity of the µc-SiC:H( n ) and the
influence of the hot-wire filament temperature on the
contact properties, we find that the electrical conductivity
of µc-SiC:H( n ) can be increased by 12 orders of magnitude
to a maximum of 0.9 S/cm due to an increased doping
density and crystallite size. This optimization of the
electrical conductivity leads to a strong decrease in
contact resistivity. Applying this SiO 2 /µc-SiC:H( n )
transparent passivating front side contact to crystalline
solar cells with an a-Si:H/c-Si heterojunction back contact
we achieve a maximum power conversion efficiency of $21.6\%$
and a short-circuit current density of 39.6 mA/cm 2 . All
devices show superior quantum efficiency in the short
wavelength region compared to the reference cells with
a-Si:H/c-Si heterojunction front contacts. Furthermore,
these transparent passivating contacts operate without any
post processing treatments, e.g., forming gas annealing or
high-temperature recrystallization.},
cin = {IEK-5},
ddc = {530},
cid = {I:(DE-Juel1)IEK-5-20101013},
pnm = {121 - Solar cells of the next generation (POF3-121)},
pid = {G:(DE-HGF)POF3-121},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000535673700006},
doi = {10.1109/JPHOTOV.2019.2947131},
url = {https://juser.fz-juelich.de/record/865947},
}