000867811 001__ 867811
000867811 005__ 20240708133741.0
000867811 0247_ $$2doi$$a10.1063/1.5089650
000867811 0247_ $$2ISSN$$a0003-6951
000867811 0247_ $$2ISSN$$a1077-3118
000867811 0247_ $$2ISSN$$a1520-8842
000867811 0247_ $$2Handle$$a2128/24421
000867811 0247_ $$2altmetric$$aaltmetric:59245257
000867811 0247_ $$2WOS$$aWOS:000465439100034
000867811 037__ $$aFZJ-2019-06421
000867811 082__ $$a530
000867811 1001_ $$0P:(DE-Juel1)174415$$aLi, Shenghao$$b0$$eCorresponding author
000867811 245__ $$aPoly-Si/SiO x /c-Si passivating contact with 738 mV implied open circuit voltage fabricated by hot-wire chemical vapor deposition
000867811 260__ $$aMelville, NY$$bAmerican Inst. of Physics$$c2019
000867811 3367_ $$2DRIVER$$aarticle
000867811 3367_ $$2DataCite$$aOutput Types/Journal article
000867811 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1582892686_8447
000867811 3367_ $$2BibTeX$$aARTICLE
000867811 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000867811 3367_ $$00$$2EndNote$$aJournal Article
000867811 520__ $$aHot-wire chemical vapor deposition (HWCVD) was utilized to develop a fast and high quality a-Si:H thin film fabrication method for poly-Si/SiOx carrier selective passivating contacts targeting at n-type passivated emitter rear totally diffused crystalline silicon solar cells. The microstructure and hydrogen content of the a-Si:H thin films were analyzed by Fourier-transform infrared spectroscopy in order to understand the influence of film properties on passivation and conductivity. Dense layers were found to be beneficial for good passivation. On the other hand, blistering appeared as a-Si:H layers became more and more dense. However, by adjusting the SiH4 flow rate and the substrate heater temperature, blistering of a-Si:H could be avoided. A suitable process window was found and firing-stable implied open circuit voltage (iVoc) of up to 738 mV was achieved. In addition to high iVoc, a low contact resistivity of 0.034 Ω cm2 was also achieved. The deposition rate of the a-Si:H layers was 7 Å/s by using HWCVD, which is one order of magnitude higher than the deposition rate reported using other deposition methods.
000867811 536__ $$0G:(DE-HGF)POF3-121$$a121 - Solar cells of the next generation (POF3-121)$$cPOF3-121$$fPOF III$$x0
000867811 588__ $$aDataset connected to CrossRef
000867811 7001_ $$0P:(DE-Juel1)162141$$aPomaska, Manuel$$b1
000867811 7001_ $$0P:(DE-HGF)0$$aHoß, Jan$$b2
000867811 7001_ $$0P:(DE-HGF)0$$aLossen, Jan$$b3
000867811 7001_ $$0P:(DE-Juel1)130283$$aPennartz, Frank$$b4
000867811 7001_ $$0P:(DE-Juel1)130277$$aNuys, Maurice$$b5
000867811 7001_ $$0P:(DE-HGF)0$$aHong, Ruijiang$$b6
000867811 7001_ $$0P:(DE-Juel1)130290$$aSchmalen, Andreas$$b7
000867811 7001_ $$0P:(DE-Juel1)130304$$aWolff, Johannes$$b8
000867811 7001_ $$0P:(DE-Juel1)130238$$aFinger, Friedhelm$$b9
000867811 7001_ $$0P:(DE-Juel1)143905$$aRau, Uwe$$b10
000867811 7001_ $$0P:(DE-Juel1)130233$$aDing, Kaining$$b11
000867811 773__ $$0PERI:(DE-600)1469436-0$$a10.1063/1.5089650$$gVol. 114, no. 15, p. 153901 -$$n15$$p153901$$tApplied physics letters$$v114$$x1077-3118$$y2019
000867811 8564_ $$uhttps://juser.fz-juelich.de/record/867811/files/2019_s.li_738mV%20ex-situ%20doped_apl.pdf$$yPublished on 2019-04-18. Available in OpenAccess from 2020-04-18.
000867811 8564_ $$uhttps://juser.fz-juelich.de/record/867811/files/2019_s.li_738mV%20ex-situ%20doped_apl.pdf?subformat=pdfa$$xpdfa$$yPublished on 2019-04-18. Available in OpenAccess from 2020-04-18.
000867811 909CO $$ooai:juser.fz-juelich.de:867811$$pdnbdelivery$$pdriver$$pVDB$$popen_access$$popenaire
000867811 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)174415$$aForschungszentrum Jülich$$b0$$kFZJ
000867811 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)162141$$aForschungszentrum Jülich$$b1$$kFZJ
000867811 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130283$$aForschungszentrum Jülich$$b4$$kFZJ
000867811 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130277$$aForschungszentrum Jülich$$b5$$kFZJ
000867811 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130290$$aForschungszentrum Jülich$$b7$$kFZJ
000867811 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130304$$aForschungszentrum Jülich$$b8$$kFZJ
000867811 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130238$$aForschungszentrum Jülich$$b9$$kFZJ
000867811 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)143905$$aForschungszentrum Jülich$$b10$$kFZJ
000867811 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130233$$aForschungszentrum Jülich$$b11$$kFZJ
000867811 9131_ $$0G:(DE-HGF)POF3-121$$1G:(DE-HGF)POF3-120$$2G:(DE-HGF)POF3-100$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bEnergie$$lErneuerbare Energien$$vSolar cells of the next generation$$x0
000867811 9141_ $$y2020
000867811 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS
000867811 915__ $$0StatID:(DE-HGF)0600$$2StatID$$aDBCoverage$$bEbsco Academic Search
000867811 915__ $$0StatID:(DE-HGF)0530$$2StatID$$aEmbargoed OpenAccess
000867811 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bAPPL PHYS LETT : 2017
000867811 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection
000867811 915__ $$0StatID:(DE-HGF)0110$$2StatID$$aWoS$$bScience Citation Index
000867811 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded
000867811 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5
000867811 915__ $$0StatID:(DE-HGF)0030$$2StatID$$aPeer Review$$bASC
000867811 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences
000867811 915__ $$0StatID:(DE-HGF)0430$$2StatID$$aNational-Konsortium
000867811 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline
000867811 915__ $$0StatID:(DE-HGF)0320$$2StatID$$aDBCoverage$$bPubMed Central
000867811 915__ $$0StatID:(DE-HGF)0420$$2StatID$$aNationallizenz
000867811 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bClarivate Analytics Master Journal List
000867811 9201_ $$0I:(DE-Juel1)IEK-5-20101013$$kIEK-5$$lPhotovoltaik$$x0
000867811 9801_ $$aFullTexts
000867811 980__ $$ajournal
000867811 980__ $$aVDB
000867811 980__ $$aUNRESTRICTED
000867811 980__ $$aI:(DE-Juel1)IEK-5-20101013
000867811 981__ $$aI:(DE-Juel1)IMD-3-20101013