TY  - JOUR
AU  - Hollermann, Henning
AU  - Lange, Felix R. L.
AU  - Jakobs, Stefan
AU  - Kerres, Peter
AU  - Wuttig, Matthias
TI  - Stoichiometry Determination of Chalcogenide Superlattices by Means of X‐Ray Diffraction and its Limits
JO  - Physica status solidi / Rapid research letters Rapid research letters [...]
VL  - 13
IS  - 4
SN  - 1862-6270
CY  - Weinheim
PB  - Wiley-VCH
M1  - FZJ-2019-06553
SP  - 1800577 -
PY  - 2019
AB  - In this paper, the potential of stoichiometry determination for chalcogenide superlattices, promising candidates for next‐generation phase‐change memory, via X‐ray diffraction is explored. To this end, a set of epitaxial GeTe/Sb2Te3 superlattice samples with varying layer thicknesses is sputter deposited. Kinematical scattering theory is employed to link the average composition with the diffraction features. The observed lattice constants of the superlattice reference unit cell follow Vegard's law, enabling a straight‐forward and non‐destructive stoichiometry determination. 
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000465029000003
DO  - DOI:10.1002/pssr.201800577
UR  - https://juser.fz-juelich.de/record/867960
ER  -