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@ARTICLE{Hollermann:867960,
      author       = {Hollermann, Henning and Lange, Felix R. L. and Jakobs,
                      Stefan and Kerres, Peter and Wuttig, Matthias},
      title        = {{S}toichiometry {D}etermination of {C}halcogenide
                      {S}uperlattices by {M}eans of {X}‐{R}ay {D}iffraction and
                      its {L}imits},
      journal      = {Physica status solidi / Rapid research letters Rapid
                      research letters [...]},
      volume       = {13},
      number       = {4},
      issn         = {1862-6270},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {FZJ-2019-06553},
      pages        = {1800577 -},
      year         = {2019},
      abstract     = {In this paper, the potential of stoichiometry determination
                      for chalcogenide superlattices, promising candidates for
                      next‐generation phase‐change memory, via X‐ray
                      diffraction is explored. To this end, a set of epitaxial
                      GeTe/Sb2Te3 superlattice samples with varying layer
                      thicknesses is sputter deposited. Kinematical scattering
                      theory is employed to link the average composition with the
                      diffraction features. The observed lattice constants of the
                      superlattice reference unit cell follow Vegard's law,
                      enabling a straight‐forward and non‐destructive
                      stoichiometry determination.},
      cin          = {PGI-10},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-10-20170113},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000465029000003},
      doi          = {10.1002/pssr.201800577},
      url          = {https://juser.fz-juelich.de/record/867960},
}