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@ARTICLE{Kindsmller:874451,
author = {Kindsmüller, Andreas and Meledin, Alexander and Mayer,
Joachim and Waser, R. and Wouters, Dirk J.},
title = {{O}n the role of the metal oxide/reactive electrode
interface during the forming procedure of valence change
{R}e{RAM} devices},
journal = {Nanoscale},
volume = {11},
number = {39},
issn = {2040-3372},
address = {Cambridge},
publisher = {RSC Publ.},
reportid = {FZJ-2020-01452},
pages = {18201 - 18208},
year = {2019},
abstract = {One of the key issues of resistive switching memory devices
is the so called “forming” process, a one time process
at a high voltage, which initializes the resistive switching
at significantly lower voltages. With this study we identify
the influence of the different layers – namely the
insulating oxide layer (ZrO2 and Ta2O5) and the reactive
ohmic electrode layer (Hf, Ta and Pt) – on the forming
voltage and the pristine capacitance of the devices. For
this, the forming voltage and pristine capacitance is
measured in dependence of the oxide layer thickness with
different electrodes. The different slopes of the forming
voltage – thickness relation for different top electrodes
give an indication that the reactive ohmic electrode is
oxidized from the oxide layer underneath and that the degree
of the oxidation depends on the thickness of the oxide layer
as well as the materials used for the oxide and electrode
layer. This finding could be confirmed by X-ray
photoelectron spectroscopy (XPS) and transmission electron
microscopy (TEM) measurements. From the electrical
measurements and the TEM images the thickness of the
oxidized electrode layer could be estimated. The degree of
the oxidation depends on the oxygen affinity of the oxide
and electrode material. The interface dependent (thickness
independent) part of the forming voltage is determined by
the material of the electrode. The magnitude of this
interface voltage could be correlated to the oxide free
energy of the electrode material. These results can support
the ongoing research towards resistive switching memory
devices with a very low forming voltage or forming free
behaviour.},
cin = {PGI-7 / JARA-FIT / ER-C-2},
ddc = {600},
cid = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$ /
I:(DE-Juel1)ER-C-2-20170209},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
pubmed = {pmid:31560012},
UT = {WOS:000512634500028},
doi = {10.1039/C9NR06624A},
url = {https://juser.fz-juelich.de/record/874451},
}