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@ARTICLE{Beale:874696,
author = {Beale, Christopher and Hamacher, Stefanie and Yakushenko,
Alexey and Bensaid, Oumaima and Willbold, Sabine and
Beltramo, Guillermo and Möller, Sören and Hartmann,
Heinrich and Neumann, Elmar and Mussler, Gregor and
Shkurmanov, Alexander and Mayer, Dirk and Wolfrum, Bernhard
and Offenhäusser, Andreas},
title = {{T}antalum( v ) 1,3-propanediolate β-diketonate solution
as a precursor to sol–gel derived, metal oxide thin films},
journal = {RSC Advances},
volume = {10},
number = {23},
issn = {2046-2069},
address = {London},
publisher = {RSC Publishing},
reportid = {FZJ-2020-01611},
pages = {13737 - 13748},
year = {2020},
abstract = {Tantalum oxide is ubiquitous in everyday life, from
capacitors in electronics to ion conductors for
electrochromic windows and electrochemical storage devices.
Investigations into sol–gel deposition of tantalum oxide,
and its sister niobium oxide, has accelerated since the
1980s and continues to this day. The aim of this study is to
synthesize a near UV sensitive, air stable, and low toxicity
tantalum sol–gel precursor solution for metal oxide thin
films – these attributes promise to reduce manufacturing
costs and allow for facile mass production. By utilizing 1D
and 2D nuclear magnetic resonance, this study shows that by
removing ethanol from the precursor solution at a relatively
low temperature and pressure, decomposition of the
photosensitive complex can be minimized while obtaining a
precursor solution with sufficient stability for storage and
processing in the atmosphere. The solution described herein
is further modified for inkjet printing, where multiple
material characterization techniques demonstrate that the
solution can be utilized in low temperature, photochemical
solution deposition of tantalum oxide, which is likely
amorphous. Tested substrates include amorphous silica,
crystalline silicon wafer, and gold/titanium/PET foil. The
hope is that these results may spark future investigations
into electronic, optical, and biomedical device fabrication
with tantalum oxide, and potentially niobium oxide, based
films using the proposed synthesis method.},
cin = {IBI-3 / IBI-2},
ddc = {540},
cid = {I:(DE-Juel1)IBI-3-20200312 / I:(DE-Juel1)IBI-2-20200312},
pnm = {523 - Controlling Configuration-Based Phenomena (POF3-523)},
pid = {G:(DE-HGF)POF3-523},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000530352000046},
doi = {10.1039/D0RA02558E},
url = {https://juser.fz-juelich.de/record/874696},
}