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@ARTICLE{Shishkin:875266,
      author       = {Shishkin, A. G. and Skryabina, O. V. and Gurtovoi, V. L.
                      and Dizhur, S. E. and Faley, M. I. and Golubov, A. A. and
                      Stolyarov, V. S.},
      title        = {{P}lanar {M}o{R}e-based direct current nano{SQUID}},
      journal      = {Superconductor science and technology},
      volume       = {33},
      number       = {6},
      issn         = {1361-6668},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {FZJ-2020-01910},
      pages        = {065005 -},
      year         = {2020},
      abstract     = {We have developed planar nanoSQUID with nanobridge-type
                      Josephson junctions based on the oxidation resistant and
                      high H c2 MoRe alloy. The objective of the research was to
                      reduce size of the SQUID loop with the aim being to reduce
                      magnetic flux noise and improve the spatial resolution of
                      the SQUID sensors. Employing RF-magnetron sputtering,
                      electron-beam lithography, and reactive ion etching in CHF3
                      + O2 plasma using Al hard masks, we have realized nanoSQUIDs
                      with Josephson junctions in the form of 30 − 50 nm
                      wide nanobridges and an effective magnetic flux capture
                      radius of ~ 95 nm. The critical temperature of the
                      fabricated devices was T c  = 7.9 K. The
                      I(V)-characteristics demonstrated critical current I 0sime
                      114 µA at 4.2 K and modulation period in magnetic fields of
                      ~ 700 Oe.},
      cin          = {PGI-5},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-5-20110106},
      pnm          = {144 - Controlling Collective States (POF3-144)},
      pid          = {G:(DE-HGF)POF3-144},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000533664400001},
      doi          = {10.1088/1361-6668/ab877c},
      url          = {https://juser.fz-juelich.de/record/875266},
}