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@ARTICLE{Goldsche:877724,
      author       = {Goldsche, M. and Verbiest, G. J. and Khodkov, T. and
                      Sonntag, Jens and Driesch, N von den and Buca, D. and
                      Stampfer, Christoph},
      title        = {{F}abrication of comb-drive actuators for straining
                      nanostructured suspended graphene},
      journal      = {Nanotechnology},
      volume       = {29},
      number       = {37},
      issn         = {1361-6528},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {FZJ-2020-02425},
      pages        = {375301 -},
      year         = {2018},
      abstract     = {We report on the fabrication and characterization of an
                      optimized comb-drive actuator design for strain-dependent
                      transport measurements on suspended graphene. We fabricate
                      devices from highly p-doped silicon using deep reactive ion
                      etching with a chromium mask. Crucially, we implement a gold
                      layer to reduce the device resistance from ≈51.6 kΩ to
                      ≈236 Ω at room temperature in order to allow for
                      strain-dependent transport measurements. The graphene is
                      integrated by mechanically transferring it directly onto the
                      actuator using a polymethylmethacrylate membrane.
                      Importantly, the integrated graphene can be nanostructured
                      afterwards to optimize device functionality. The minimum
                      feature size of the structured suspended graphene is 30 nm,
                      which allows for interesting device concepts such as
                      mechanically-tunable nanoconstrictions. Finally, we
                      characterize the fabricated devices by measuring the Raman
                      spectrum as well as the a mechanical resonance frequency of
                      an integrated graphene sheet for different strain values},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:29924743},
      UT           = {WOS:000438626600001},
      doi          = {10.1088/1361-6528/aacdec},
      url          = {https://juser.fz-juelich.de/record/877724},
}