000878468 001__ 878468 000878468 005__ 20210130005630.0 000878468 0247_ $$2doi$$a10.3390/ma13163645 000878468 0247_ $$2Handle$$a2128/25607 000878468 0247_ $$2altmetric$$aaltmetric:88550689 000878468 0247_ $$2pmid$$apmid:32824570 000878468 0247_ $$2WOS$$aWOS:000567070600001 000878468 037__ $$aFZJ-2020-02873 000878468 082__ $$a600 000878468 1001_ $$0P:(DE-HGF)0$$aZhang, Liyao$$b0$$eCorresponding author 000878468 245__ $$aStructural Property Study for GeSn Thin Films 000878468 260__ $$aBasel$$bMDPI$$c2020 000878468 3367_ $$2DRIVER$$aarticle 000878468 3367_ $$2DataCite$$aOutput Types/Journal article 000878468 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1599629701_20284 000878468 3367_ $$2BibTeX$$aARTICLE 000878468 3367_ $$2ORCID$$aJOURNAL_ARTICLE 000878468 3367_ $$00$$2EndNote$$aJournal Article 000878468 520__ $$aThe structural properties of GeSn thin films with different Sn concentrations and thicknesses grown on Ge (001) by molecular beam epitaxy (MBE) and on Ge-buffered Si (001) wafers by chemical vapor deposition (CVD) were analyzed through high resolution X-ray diffraction and cross-sectional transmission electron microscopy. Two-dimensional reciprocal space maps around the asymmetric (224) reflection were collected by X-ray diffraction for both the whole structures and the GeSn epilayers. The broadenings of the features of the GeSn epilayers with different relaxations in the ω direction, along the ω-2θ direction and parallel to the surface were investigated. The dislocations were identified by transmission electron microscopy. Threading dislocations were found in MBE grown GeSn layers, but not in the CVD grown ones. The point defects and dislocations were two possible reasons for the poor optical properties in the GeSn alloys grown by MBE 000878468 536__ $$0G:(DE-HGF)POF3-521$$a521 - Controlling Electron Charge-Based Phenomena (POF3-521)$$cPOF3-521$$fPOF III$$x0 000878468 7001_ $$0P:(DE-HGF)0$$aSong, Yuxin$$b1 000878468 7001_ $$0P:(DE-Juel1)161247$$avon den Driesch, Nils$$b2 000878468 7001_ $$0P:(DE-HGF)0$$aZhang, Zhenpu$$b3 000878468 7001_ $$0P:(DE-Juel1)125569$$aBuca, Dan Mihai$$b4 000878468 7001_ $$0P:(DE-Juel1)125588$$aGrützmacher, Detlev$$b5 000878468 7001_ $$0P:(DE-HGF)0$$aWang, Shumin$$b6$$eCorresponding author 000878468 773__ $$0PERI:(DE-600)2487261-1$$a10.3390/ma13163645$$n16$$p3645$$tMaterials$$v13$$x1996-1944$$y2020 000878468 8564_ $$uhttps://juser.fz-juelich.de/record/878468/files/materials-13-03645.pdf$$yOpenAccess 000878468 8564_ $$uhttps://juser.fz-juelich.de/record/878468/files/materials-13-03645.pdf?subformat=pdfa$$xpdfa$$yOpenAccess 000878468 909CO $$ooai:juser.fz-juelich.de:878468$$pdnbdelivery$$pdriver$$pVDB$$popen_access$$popenaire 000878468 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)161247$$aForschungszentrum Jülich$$b2$$kFZJ 000878468 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)125569$$aForschungszentrum Jülich$$b4$$kFZJ 000878468 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)125588$$aForschungszentrum Jülich$$b5$$kFZJ 000878468 9131_ $$0G:(DE-HGF)POF3-521$$1G:(DE-HGF)POF3-520$$2G:(DE-HGF)POF3-500$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bKey Technologies$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Electron Charge-Based Phenomena$$x0 000878468 9141_ $$y2020 000878468 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0160$$2StatID$$aDBCoverage$$bEssential Science Indicators$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)1160$$2StatID$$aDBCoverage$$bCurrent Contents - Engineering, Computing and Technology$$d2019-12-20 000878468 915__ $$0LIC:(DE-HGF)CCBY4$$2HGFVOC$$aCreative Commons Attribution CC BY 4.0 000878468 915__ $$0StatID:(DE-HGF)0600$$2StatID$$aDBCoverage$$bEbsco Academic Search$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bMATERIALS : 2018$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0501$$2StatID$$aDBCoverage$$bDOAJ Seal$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0500$$2StatID$$aDBCoverage$$bDOAJ$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0700$$2StatID$$aFees$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess 000878468 915__ $$0StatID:(DE-HGF)0030$$2StatID$$aPeer Review$$bASC$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0561$$2StatID$$aArticle Processing Charges$$f2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0310$$2StatID$$aDBCoverage$$bNCBI Molecular Biology Database$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0320$$2StatID$$aDBCoverage$$bPubMed Central$$d2019-12-20 000878468 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bClarivate Analytics Master Journal List$$d2019-12-20 000878468 920__ $$lyes 000878468 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0 000878468 9201_ $$0I:(DE-Juel1)PGI-10-20170113$$kPGI-10$$lJARA Institut Green IT$$x1 000878468 9201_ $$0I:(DE-Juel1)VDB881$$kJARA-FIT$$lJülich-Aachen Research Alliance - Fundamentals of Future Information Technology$$x2 000878468 980__ $$ajournal 000878468 980__ $$aVDB 000878468 980__ $$aUNRESTRICTED 000878468 980__ $$aI:(DE-Juel1)PGI-9-20110106 000878468 980__ $$aI:(DE-Juel1)PGI-10-20170113 000878468 980__ $$aI:(DE-Juel1)VDB881 000878468 9801_ $$aFullTexts