Hauptseite > Publikationsdatenbank > Cation diffusion in polycrystalline thin films of monoclinic HfO 2 deposited by atomic layer deposition > print

001     878685
005     20210130005729.0
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082 _ _ |a 600
100 1 _ |a Mueller, Michael P.
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245 _ _ |a Cation diffusion in polycrystalline thin films of monoclinic HfO 2 deposited by atomic layer deposition
260 _ _ |a Melville, NY
|c 2020
|b AIP Publ.
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520 _ _ |a Though present in small amounts and migrating at low rates, intrinsic cation defects play a central role in governing the operational lifetime of oxide-ion conducting materials through slow degradation processes such as interdiffusion, kinetic demixing, grain growth, and creep. In this study, a new experimental approach to characterizing the behavior of such slow-moving, minority defects is presented. Diffusion is probed in samples with a constant cation-defect concentration well above the equilibrium values. This approach is applied to monoclinic hafnium dioxide, m-HfO2. To this end, nanocrystalline thin films of m-HfO2 were prepared by atomic layer deposition. Diffusion experiments with ZrO2 as a diffusion source were performed in the temperature range 1173 ≤ T/K ≤ 1323 in air. The Zr diffusion profiles obtained subsequently by secondary ion mass spectrometry exhibited the following two features: the first feature was attributed to slow bulk diffusion and the second was attributed to combined fast grain-boundary diffusion and slow bulk diffusion. The activation enthalpy of Zr diffusion in bulk HfO2 was found to be (2.1 ± 0.2) eV. This result is consistent with the density-functional-theory calculations of hafnium-vacancy migration in m-HfO2, which yield values of ∼2 eV for a specific path. The activation enthalpy of the grain-boundary diffusion of (2.1 ± 0.3) eV is equal to that for bulk diffusion. This behavior is interpreted in terms of enhanced cation diffusion along space-charge layers
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700 1 _ |a Pingen, Katrin
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700 1 _ |a Hardtdegen, Alexander
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700 1 _ |a Aussen, Stephan
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700 1 _ |a Kindsmueller, Andreas
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700 1 _ |a Hoffmann-Eifert, Susanne
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700 1 _ |a De Souza, Roger A.
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773 _ _ |a 10.1063/5.0013965
|g Vol. 8, no. 8, p. 081104 -
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