000878687 001__ 878687
000878687 005__ 20210130005730.0
000878687 0247_ $$2doi$$a10.1039/D0NR01847C
000878687 0247_ $$2ISSN$$a2040-3364
000878687 0247_ $$2ISSN$$a2040-3372
000878687 0247_ $$2Handle$$a2128/26070
000878687 0247_ $$2altmetric$$aaltmetric:84188294
000878687 0247_ $$2pmid$$apmid:32543637
000878687 0247_ $$2WOS$$aWOS:000545599900040
000878687 037__ $$aFZJ-2020-03005
000878687 082__ $$a600
000878687 1001_ $$00000-0003-1735-9215$$aDippel, Ann-Christin$$b0$$eCorresponding author
000878687 245__ $$aEvolution of short-range order in chemically and physically grown thin film bilayer structures for electronic applications
000878687 260__ $$aCambridge$$bRSC Publ.$$c2020
000878687 3367_ $$2DRIVER$$aarticle
000878687 3367_ $$2DataCite$$aOutput Types/Journal article
000878687 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1604673287_2064
000878687 3367_ $$2BibTeX$$aARTICLE
000878687 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000878687 3367_ $$00$$2EndNote$$aJournal Article
000878687 520__ $$aFunctional thin films are commonly integrated in electronic devices as part of a multi-layer architecture. Metal/oxide/metal structures e.g. in resistive switching memory and piezoelectric microelectrochemical devices are relevant applications. The films are mostly fabricated from the vapour phase or by solution deposition. Processing conditions with a limited thermal budget typically yield nanocrystalline or amorphous layers. For these aperiodic materials, the structure is described in terms of the local atomic order on the length scale of a few chemical bonds up to several nanometres. Previous structural studies of the short-range order in thin films have addressed the simple case of single coatings on amorphous substrates. By contrast, this work demonstrates how to probe the local structure of two stacked functional layers by means of grazing incidence total X-ray scattering and pair distribution function (PDF) analysis. The key to separating the contributions of the individual thin films is the variation of the incidence angle below the critical angle of total external reflection, In this way, structural information was obtained for functional oxides on textured electrodes, i.e. PbZr0.53O0.47O3 on Pt[111] and HfO2 on TiN, as well as HfO2–TiOx bilayers. For these systems, the transformations from disordered phases into periodic structures via thermal teatment are described. These examples highlight the opportunity to develop a detailed understanding of structural evolution during the fabrication of real thin film devices using the PDF technique.
000878687 536__ $$0G:(DE-HGF)POF3-521$$a521 - Controlling Electron Charge-Based Phenomena (POF3-521)$$cPOF3-521$$fPOF III$$x0
000878687 536__ $$0G:(DE-HGF)POF3-524$$a524 - Controlling Collective States (POF3-524)$$cPOF3-524$$fPOF III$$x1
000878687 588__ $$aDataset connected to CrossRef
000878687 7001_ $$0P:(DE-HGF)0$$aGutowski, Olof$$b1
000878687 7001_ $$00000-0003-1103-8103$$aKlemeyer, Lars$$b2
000878687 7001_ $$0P:(DE-Juel1)130551$$aBoettger, Ulrich$$b3
000878687 7001_ $$0P:(DE-HGF)0$$aBerg, Fenja$$b4
000878687 7001_ $$0P:(DE-HGF)0$$aSchneller, Theodor$$b5
000878687 7001_ $$0P:(DE-Juel1)165704$$aHardtdegen, Alexander$$b6
000878687 7001_ $$0P:(DE-Juel1)169457$$aAussen, Stephan$$b7
000878687 7001_ $$0P:(DE-Juel1)130717$$aHoffmann-Eifert, Susanne$$b8
000878687 7001_ $$0P:(DE-HGF)0$$aZimmermann, Martin v.$$b9
000878687 773__ $$0PERI:(DE-600)2515664-0$$a10.1039/D0NR01847C$$gVol. 12, no. 24, p. 13103 - 13112$$n24$$p13103 - 13112$$tNanoscale$$v12$$x2040-3372$$y2020
000878687 8564_ $$uhttps://juser.fz-juelich.de/record/878687/files/d0nr01847c.pdf$$yRestricted
000878687 8564_ $$uhttps://juser.fz-juelich.de/record/878687/files/nanoscaleManuscript_rev.pdf$$yPublished on 2020-06-16. Available in OpenAccess from 2021-06-16.
000878687 8564_ $$uhttps://juser.fz-juelich.de/record/878687/files/si_rev.pdf$$yPublished on 2020-06-16. Available in OpenAccess from 2021-06-16.
000878687 8564_ $$uhttps://juser.fz-juelich.de/record/878687/files/d0nr01847c.pdf?subformat=pdfa$$xpdfa$$yRestricted
000878687 8564_ $$uhttps://juser.fz-juelich.de/record/878687/files/nanoscaleManuscript_rev.pdf?subformat=pdfa$$xpdfa$$yPublished on 2020-06-16. Available in OpenAccess from 2021-06-16.
000878687 8564_ $$uhttps://juser.fz-juelich.de/record/878687/files/si_rev.pdf?subformat=pdfa$$xpdfa$$yPublished on 2020-06-16. Available in OpenAccess from 2021-06-16.
000878687 909CO $$ooai:juser.fz-juelich.de:878687$$pdnbdelivery$$pdriver$$pVDB$$popen_access$$popenaire
000878687 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)165704$$aForschungszentrum Jülich$$b6$$kFZJ
000878687 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)169457$$aForschungszentrum Jülich$$b7$$kFZJ
000878687 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130717$$aForschungszentrum Jülich$$b8$$kFZJ
000878687 9131_ $$0G:(DE-HGF)POF3-521$$1G:(DE-HGF)POF3-520$$2G:(DE-HGF)POF3-500$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bKey Technologies$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Electron Charge-Based Phenomena$$x0
000878687 9131_ $$0G:(DE-HGF)POF3-524$$1G:(DE-HGF)POF3-520$$2G:(DE-HGF)POF3-500$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bKey Technologies$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Collective States$$x1
000878687 9141_ $$y2020
000878687 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)0160$$2StatID$$aDBCoverage$$bEssential Science Indicators$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)0530$$2StatID$$aEmbargoed OpenAccess
000878687 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bNANOSCALE : 2018$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)9905$$2StatID$$aIF >= 5$$bNANOSCALE : 2018$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)0110$$2StatID$$aWoS$$bScience Citation Index$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)0310$$2StatID$$aDBCoverage$$bNCBI Molecular Biology Database$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)0430$$2StatID$$aNational-Konsortium$$d2020-02-27$$wger
000878687 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline$$d2020-02-27
000878687 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bClarivate Analytics Master Journal List$$d2020-02-27
000878687 9201_ $$0I:(DE-Juel1)PGI-7-20110106$$kPGI-7$$lElektronische Materialien$$x0
000878687 9201_ $$0I:(DE-Juel1)PGI-10-20170113$$kPGI-10$$lJARA Institut Green IT$$x1
000878687 9201_ $$0I:(DE-82)080009_20140620$$kJARA-FIT$$lJARA-FIT$$x2
000878687 9201_ $$0I:(DE-Juel1)PTJ-NMT-20090406$$kPTJ-NMT$$lNeue Materialien und Chemie$$x3
000878687 980__ $$ajournal
000878687 980__ $$aVDB
000878687 980__ $$aUNRESTRICTED
000878687 980__ $$aI:(DE-Juel1)PGI-7-20110106
000878687 980__ $$aI:(DE-Juel1)PGI-10-20170113
000878687 980__ $$aI:(DE-82)080009_20140620
000878687 980__ $$aI:(DE-Juel1)PTJ-NMT-20090406
000878687 9801_ $$aFullTexts