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@ARTICLE{Dippel:878687,
      author       = {Dippel, Ann-Christin and Gutowski, Olof and Klemeyer, Lars
                      and Boettger, Ulrich and Berg, Fenja and Schneller, Theodor
                      and Hardtdegen, Alexander and Aussen, Stephan and
                      Hoffmann-Eifert, Susanne and Zimmermann, Martin v.},
      title        = {{E}volution of short-range order in chemically and
                      physically grown thin film bilayer structures for electronic
                      applications},
      journal      = {Nanoscale},
      volume       = {12},
      number       = {24},
      issn         = {2040-3372},
      address      = {Cambridge},
      publisher    = {RSC Publ.},
      reportid     = {FZJ-2020-03005},
      pages        = {13103 - 13112},
      year         = {2020},
      abstract     = {Functional thin films are commonly integrated in electronic
                      devices as part of a multi-layer architecture.
                      Metal/oxide/metal structures e.g. in resistive switching
                      memory and piezoelectric microelectrochemical devices are
                      relevant applications. The films are mostly fabricated from
                      the vapour phase or by solution deposition. Processing
                      conditions with a limited thermal budget typically yield
                      nanocrystalline or amorphous layers. For these aperiodic
                      materials, the structure is described in terms of the local
                      atomic order on the length scale of a few chemical bonds up
                      to several nanometres. Previous structural studies of the
                      short-range order in thin films have addressed the simple
                      case of single coatings on amorphous substrates. By
                      contrast, this work demonstrates how to probe the local
                      structure of two stacked functional layers by means of
                      grazing incidence total X-ray scattering and pair
                      distribution function (PDF) analysis. The key to separating
                      the contributions of the individual thin films is the
                      variation of the incidence angle below the critical angle of
                      total external reflection, In this way, structural
                      information was obtained for functional oxides on textured
                      electrodes, i.e. PbZr0.53O0.47O3 on Pt[111] and HfO2 on TiN,
                      as well as HfO2–TiOx bilayers. For these systems, the
                      transformations from disordered phases into periodic
                      structures via thermal teatment are described. These
                      examples highlight the opportunity to develop a detailed
                      understanding of structural evolution during the fabrication
                      of real thin film devices using the PDF technique.},
      cin          = {PGI-7 / PGI-10 / JARA-FIT / PTJ-NMT},
      ddc          = {600},
      cid          = {I:(DE-Juel1)PGI-7-20110106 / I:(DE-Juel1)PGI-10-20170113 /
                      $I:(DE-82)080009_20140620$ / I:(DE-Juel1)PTJ-NMT-20090406},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521) / 524 - Controlling Collective States (POF3-524)},
      pid          = {G:(DE-HGF)POF3-521 / G:(DE-HGF)POF3-524},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:32543637},
      UT           = {WOS:000545599900040},
      doi          = {10.1039/D0NR01847C},
      url          = {https://juser.fz-juelich.de/record/878687},
}