%0 Book Section
%A Thomas, R.
%A Ehrhart, P.
%A Waser, R.
%A Schubert, J.
%A Devi, A.
%A Katiyar, R.S.
%T Liquid injection MOCVD grown binary oxides and ternary rare-earth oxide as alternate gate-oxides for logic devices
%V 33
%@ 1938-5862
%C Pennington, NJ
%I Electrochemical Society (ECS)
%M FZJ-2020-03645
%B ECS transactions
%P 211 - 219
%D 2010
%Z Record converted from VDB: 12.11.2012
%F PUB:(DE-HGF)7
%9 Contribution to a book
%U <Go to ISI:>//WOS:000313332400023
%R 10.1149/1.3481608
%U https://juser.fz-juelich.de/record/885241