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@INBOOK{Thomas:885241,
      author       = {Thomas, R. and Ehrhart, P. and Waser, R. and Schubert, J.
                      and Devi, A. and Katiyar, R.S.},
      title        = {{L}iquid injection {MOCVD} grown binary oxides and ternary
                      rare-earth oxide as alternate gate-oxides for logic devices},
      volume       = {33},
      issn         = {1938-5862},
      address      = {Pennington, NJ},
      publisher    = {Electrochemical Society (ECS)},
      reportid     = {FZJ-2020-03645},
      series       = {ECS transactions},
      pages        = {211 - 219},
      year         = {2010},
      note         = {Record converted from VDB: 12.11.2012},
      cin          = {IFF-6 / JARA-FIT / IBN-1},
      ddc          = {540},
      cid          = {I:(DE-Juel1)VDB786 / $I:(DE-82)080009_20140620$ /
                      I:(DE-Juel1)VDB799},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)7},
      UT           = {WOS:000313332400023},
      doi          = {10.1149/1.3481608},
      url          = {https://juser.fz-juelich.de/record/885241},
}