%0 Book Section
%A Lopes, J.M.J.
%A Durgun Özben, E.
%A Schnee, M.
%A Luptak, R.
%A Nichau, A.
%A Tiedemann, A.
%A Yu, W.
%A Zhao, Q.T.
%A Besmehn, A.
%A Breuer, U.
%A Luysberg, M.
%A Lenk, St.
%A Schubert, J.
%A Mantl, S.
%T Electrical and structural properties of ternary rare-earth oxides on Si and higher mobility substrates and their integration as high-k gate dielectrics in MOSFET devices
%V 35
%@ 1938-5862
%C Pennington, NJ
%I Electrochemical Society (ECS)
%M FZJ-2020-03652
%B ECS transactions
%P 461 - 479
%D 2011
%Z Record converted from VDB: 12.11.2012
%F PUB:(DE-HGF)7
%9 Contribution to a book
%U https://juser.fz-juelich.de/record/885248