TY - CHAP AU - Lopes, J.M.J. AU - Durgun Özben, E. AU - Schnee, M. AU - Luptak, R. AU - Nichau, A. AU - Tiedemann, A. AU - Yu, W. AU - Zhao, Q.T. AU - Besmehn, A. AU - Breuer, U. AU - Luysberg, M. AU - Lenk, St. AU - Schubert, J. AU - Mantl, S. TI - Electrical and structural properties of ternary rare-earth oxides on Si and higher mobility substrates and their integration as high-k gate dielectrics in MOSFET devices VL - 35 SN - 1938-5862 CY - Pennington, NJ PB - Electrochemical Society (ECS) M1 - FZJ-2020-03652 T2 - ECS transactions SP - 461 - 479 PY - 2011 N1 - Record converted from VDB: 12.11.2012 LB - PUB:(DE-HGF)7 UR - https://juser.fz-juelich.de/record/885248 ER -