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@INBOOK{Lopes:885248,
      author       = {Lopes, J.M.J. and Durgun Özben, E. and Schnee, M. and
                      Luptak, R. and Nichau, A. and Tiedemann, A. and Yu, W. and
                      Zhao, Q.T. and Besmehn, A. and Breuer, U. and Luysberg, M.
                      and Lenk, St. and Schubert, J. and Mantl, S.},
      title        = {{E}lectrical and structural properties of ternary
                      rare-earth oxides on {S}i and higher mobility substrates and
                      their integration as high-k gate dielectrics in {MOSFET}
                      devices},
      volume       = {35},
      issn         = {1938-5862},
      address      = {Pennington, NJ},
      publisher    = {Electrochemical Society (ECS)},
      reportid     = {FZJ-2020-03652},
      series       = {ECS transactions},
      pages        = {461 - 479},
      year         = {2011},
      note         = {Record converted from VDB: 12.11.2012},
      cin          = {PGI-9 / PGI-5 / ZCH / JARA-FIT},
      ddc          = {540},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)PGI-5-20110106 /
                      I:(DE-Juel1)ZCH-20090406 / $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)7},
      url          = {https://juser.fz-juelich.de/record/885248},
}