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@INBOOK{Hardtdegen:885316,
      author       = {Hardtdegen, A. and Zhang, H. and Hoffmann-Eifert, S.},
      title        = {{T}uning the {P}erformance of {P}t/{H}f{O}2/{T}i/{P}t
                      {R}e{RAM} {D}evices {O}btained from {P}lasma-{E}nhanced
                      {A}tomic {L}ayer {D}eposition for {H}f{O}2 {T}hin {F}ilms},
      volume       = {75},
      issn         = {1938-5862},
      address      = {Pennington, NJ},
      reportid     = {FZJ-2020-03720},
      series       = {ECS transactions},
      pages        = {177 - 184},
      year         = {2016},
      cin          = {PGI-7 / PGI-10 / IBG-3 / JARA-FIT},
      ddc          = {540},
      cid          = {I:(DE-Juel1)PGI-7-20110106 / I:(DE-Juel1)PGI-10-20170113 /
                      I:(DE-Juel1)IBG-3-20101118 / $I:(DE-82)080009_20140620$},
      pnm          = {524 - Controlling Collective States (POF3-524)},
      pid          = {G:(DE-HGF)POF3-524},
      typ          = {PUB:(DE-HGF)7},
      UT           = {WOS:000578405600019},
      doi          = {10.1149/07506.0177ecst},
      url          = {https://juser.fz-juelich.de/record/885316},
}