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@ARTICLE{Mikulics:885924,
      author       = {Mikulics, Martin and Sofer, Zdenĕk and Winden, Andreas and
                      Trellenkamp, Stefan and Förster, Beate and Mayer, Joachim
                      and Hardtdegen, Hilde Helen},
      title        = {{N}ano-{LED} induced chemical reactions for structuring
                      processes},
      journal      = {Nanoscale advances},
      volume       = {2},
      number       = {11},
      issn         = {2516-0230},
      address      = {Cambridge},
      publisher    = {Royal Society of Chemistry},
      reportid     = {FZJ-2020-04180},
      pages        = {5421-5427},
      year         = {2020},
      abstract     = {We present a structuring technique based on the
                      initialization of chemical reactions by an array of
                      nano-LEDs which is used in the near-field as well as in the
                      far-field regime. In the near-field regime, we demonstrate
                      first results with the nano-LED array for lithography using
                      the photoresist DiazoNaphthoQuinone-(DNQ)-sulfonate for the
                      fabrication of holes in the resist down to ∼75 nanometres
                      in diameter. In contrast, the nano-LEDs can also be employed
                      in the far-field regime to expose thin films of the monomer
                      bisphenol A-glycidyl methacrylate (Bis-GMA) and to
                      initialize polymerization locally. Photosensitive films were
                      patterned and spherical cone-shaped three dimensional
                      objects with diameters ranging from ∼480 nm up to 20
                      micrometres were obtained. The modification in the material
                      as a result of the photochemical reaction induced i.e. by
                      polymerization was confirmed by Raman spectroscopy. This
                      structuring maskless technique has the potential to induce
                      substantial changes in photosensitive molecules and to
                      produce the desired structures from the tens of microns down
                      to the nanometre scale.},
      cin          = {ER-C-2},
      ddc          = {540},
      cid          = {I:(DE-Juel1)ER-C-2-20170209},
      pnm          = {143 - Controlling Configuration-Based Phenomena (POF3-143)},
      pid          = {G:(DE-HGF)POF3-143},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000588627700033},
      doi          = {10.1039/D0NA00851F},
      url          = {https://juser.fz-juelich.de/record/885924},
}