TY  - JOUR
AU  - Liu, Yong
AU  - Pomaska, Manuel
AU  - Duan, Weiyuan
AU  - Kim, Do Yun
AU  - Köhler, Malte
AU  - Breuer, Uwe
AU  - Ding, Kaining
TI  - Phosphorous Catalytic‐Doping of Silicon Alloys for the Use in Silicon Heterojunction Solar Cells
JO  - Advanced engineering materials
VL  - 22
IS  - 6
SN  - 1527-2648
CY  - Frankfurt, M.
PB  - Deutsche Gesellschaft für Materialkunde
M1  - FZJ-2020-04205
SP  - 1900613 -
PY  - 2020
AB  - Herein, the effectiveness of post‐deposition catalytic‐doping (cat‐doping) on various doped silicon alloys, i.e., microcrystalline silicon (μc‐Si:H), nanocrystalline silicon oxide (nc‐SiOx:H), and microcrystalline silicon carbide (μc‐SiC:H), for the use in silicon heterojunction solar cells is investigated. Phosphorous (P) profiles by secondary ion mass spectrometry (SIMS) reveal the P distribution and its difference in these three silicon alloy films. Conductivity and effective charge carrier lifetime of different samples are found to increase to different extents after cat‐doping process. Coexistence of thermal annealing, hydrogenation, and phosphorus doping is confirmed by using different gases during the cat‐doping process.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000487626800001
DO  - DOI:10.1002/adem.201900613
UR  - https://juser.fz-juelich.de/record/885978
ER  -