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@ARTICLE{Liu:885978,
      author       = {Liu, Yong and Pomaska, Manuel and Duan, Weiyuan and Kim, Do
                      Yun and Köhler, Malte and Breuer, Uwe and Ding, Kaining},
      title        = {{P}hosphorous {C}atalytic‐{D}oping of {S}ilicon {A}lloys
                      for the {U}se in {S}ilicon {H}eterojunction {S}olar {C}ells},
      journal      = {Advanced engineering materials},
      volume       = {22},
      number       = {6},
      issn         = {1527-2648},
      address      = {Frankfurt, M.},
      publisher    = {Deutsche Gesellschaft für Materialkunde},
      reportid     = {FZJ-2020-04205},
      pages        = {1900613 -},
      year         = {2020},
      abstract     = {Herein, the effectiveness of post‐deposition
                      catalytic‐doping (cat‐doping) on various doped silicon
                      alloys, i.e., microcrystalline silicon (μc‐Si:H),
                      nanocrystalline silicon oxide (nc‐SiOx:H), and
                      microcrystalline silicon carbide (μc‐SiC:H), for the use
                      in silicon heterojunction solar cells is investigated.
                      Phosphorous (P) profiles by secondary ion mass spectrometry
                      (SIMS) reveal the P distribution and its difference in these
                      three silicon alloy films. Conductivity and effective charge
                      carrier lifetime of different samples are found to increase
                      to different extents after cat‐doping process. Coexistence
                      of thermal annealing, hydrogenation, and phosphorus doping
                      is confirmed by using different gases during the
                      cat‐doping process.},
      cin          = {IEK-5},
      ddc          = {660},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {121 - Solar cells of the next generation (POF3-121)},
      pid          = {G:(DE-HGF)POF3-121},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000487626800001},
      doi          = {10.1002/adem.201900613},
      url          = {https://juser.fz-juelich.de/record/885978},
}