%0 Thesis
%A Hu, Shiyu
%T Comparison of GST (Ge-Sb-Te alloys) growth via MOVPE and MBE
%I RWTH Aachen
%V Masterarbeit
%M FZJ-2020-05192
%P 68p.
%D 2020
%Z Masterarbeit, RWTH Aachen, 2020
%F PUB:(DE-HGF)19
%9 Master Thesis
%U https://juser.fz-juelich.de/record/888763