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@ARTICLE{Yan:889075,
author = {Yan, Hong and Börgers, Jacqueline Marie and Rose,
Marc-André and Baeumer, Christoph and Kim, Bongju and Jin,
Lei and Dittmann, Regina and Gunkel, Felix},
title = {{S}toichiometry and {T}ermination {C}ontrol of {L}a{A}l{O}
3 /{S}r{T}i{O} 3 {B}ilayer {I}nterfaces},
journal = {Advanced materials interfaces},
volume = {8},
number = {3},
issn = {2196-7350},
address = {Weinheim},
publisher = {Wiley-VCH},
reportid = {FZJ-2021-00011},
pages = {2001477},
year = {2021},
abstract = {Driven by the interest in fundamental physics and potential
applications in novel electronic devices, intense effort is
devoted to integration of oxide‐based 2D electron gases
(2DEGs) with other functional materials. As a classic model
system, LaAlO3/SrTiO3 (LAO/STO) has gained significant
attentions. However, due to limitations in synthesis and
high demands on the involved thin films, the formation of
conductive interfaces between artificially grown STO and LAO
thin films is an extreme challenge; oftentimes these
interfaces remain insulating or show poor transport
properties, which inhibits the development of
all‐thin‐film devices. Here, by adopting high
temperature growth to achieve step‐flow growth mode and
fine‐tuning the laser fluence during pulsed laser
deposition, high quality homoepitaxial STO thin films with
sufficiently low point‐defect concentration and
controllable surface termination are obtained. Fully
metallic 2DEGs are then realized at interfaces between STO
thin films and both crystalline and amorphous LAO
overlayers. The observed slightly reduced mobility in the
bilayer LAO/STO/STO structures as compared with
single‐layer LAO/STO structures is related to residual
defect formation during STO synthesis, yielding a disordered
metallic oxide system. The results give prospect of
multilayer interfaces potentially accessible in superlattice
structures and provide a reliable starting point for
back‐gated all‐thin‐film field‐effect devices.},
cin = {PGI-7 / JARA-FIT / ER-C-1},
ddc = {600},
cid = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$ /
I:(DE-Juel1)ER-C-1-20170209},
pnm = {899 - ohne Topic (POF4-899)},
pid = {G:(DE-HGF)POF4-899},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000598649900001},
doi = {10.1002/admi.202001477},
url = {https://juser.fz-juelich.de/record/889075},
}