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%0 Journal Article %A Singh, Aryak %A Turan, Bugra %A Haas, Stefan %A Lambertz, Andreas %A Ding, Kaining %A Rau, Uwe %T Damage-free Ablation Process for Back-contacted Silicon Heterojunction Solar Cells %J Journal of Laser Micro/Nanoengineering %V 17 %N 3 %@ 1880-0688 %C Osaka %M FZJ-2021-00226 %P 314-323 %D 2018 %F PUB:(DE-HGF)16 %9 Journal Article %U <Go to ISI:>//WOS:000453263900029 %R 10.2961/jlmn.2018.03.0029 %U https://juser.fz-juelich.de/record/889335