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TY - JOUR AU - Singh, Aryak AU - Turan, Bugra AU - Haas, Stefan AU - Lambertz, Andreas AU - Ding, Kaining AU - Rau, Uwe TI - Damage-free Ablation Process for Back-contacted Silicon Heterojunction Solar Cells JO - Journal of Laser Micro/Nanoengineering VL - 17 IS - 3 SN - 1880-0688 CY - Osaka M1 - FZJ-2021-00226 SP - 314-323 PY - 2018 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:000453263900029 DO - DOI:10.2961/jlmn.2018.03.0029 UR - https://juser.fz-juelich.de/record/889335 ER -