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@ARTICLE{Singh:889335,
author = {Singh, Aryak and Turan, Bugra and Haas, Stefan and
Lambertz, Andreas and Ding, Kaining and Rau, Uwe},
title = {{D}amage-free {A}blation {P}rocess for {B}ack-contacted
{S}ilicon {H}eterojunction {S}olar {C}ells},
journal = {Journal of Laser Micro/Nanoengineering},
volume = {17},
number = {3},
issn = {1880-0688},
address = {Osaka},
reportid = {FZJ-2021-00226},
pages = {314-323},
year = {2018},
cin = {IEK-5},
ddc = {530},
cid = {I:(DE-Juel1)IEK-5-20101013},
pnm = {121 - Solar cells of the next generation (POF3-121)},
pid = {G:(DE-HGF)POF3-121},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000453263900029},
doi = {10.2961/jlmn.2018.03.0029},
url = {https://juser.fz-juelich.de/record/889335},
}