000890245 001__ 890245
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000890245 1001_ $$0P:(DE-Juel1)180168$$aPingen, Katrin$$b0$$eCorresponding author
000890245 245__ $$aWachstum epitaktischer HfO2 Dünnschichten mittels PLD$$f - 2020-04-30
000890245 260__ $$c2020
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000890245 502__ $$aMasterarbeit, RWTH Aachen University, 2020$$bMasterarbeit$$cRWTH Aachen University$$d2020
000890245 536__ $$0G:(DE-HGF)POF3-521$$a521 - Controlling Electron Charge-Based Phenomena (POF3-521)$$cPOF3-521$$fPOF III$$x0
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