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@MASTERSTHESIS{Pingen:890245,
      author       = {Pingen, Katrin},
      title        = {{W}achstum epitaktischer {H}f{O}2 {D}ünnschichten mittels
                      {PLD}},
      school       = {RWTH Aachen University},
      type         = {Masterarbeit},
      reportid     = {FZJ-2021-00829},
      pages        = {80},
      year         = {2020},
      note         = {Masterarbeit, RWTH Aachen University, 2020},
      cin          = {PGI-7 / JARA-FIT},
      cid          = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)19},
      url          = {https://juser.fz-juelich.de/record/890245},
}