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@ARTICLE{Faley:890422,
      author       = {Faley, Michael and Bikulov, Timur and Bosboom, Vincent and
                      Golubov, Alexander A and Dunin-Borkowski, Rafal E},
      title        = {{B}ulk nanomachining of cantilevers with {N}b nano{SQUID}s
                      based on nanobridge {J}osephson junctions},
      journal      = {Superconductor science and technology},
      volume       = {34},
      number       = {3},
      issn         = {1361-6668},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {FZJ-2021-00942},
      pages        = {035014},
      year         = {2021},
      abstract     = {Nanometer-scale superconducting quantum interference
                      devices (nanoSQUIDs) were fabricated within a distance of 1
                      µm from the corners of 2 $ \times $ 2 $ \times $ 0.05 mm Si
                      cantilevers that are intended for use in a scanning
                      nanoSQUID microscope. The nanoSQUIDs contained Josephson
                      junctions (JJs) in the form of Nb-based nanobridges, which
                      had widths down to 10 nm and were patterned using hydrogen
                      silsesquioxane negative resist. Numerical simulations of the
                      superconducting current and the spatial distribution of the
                      order parameter in the nanobridge JJs and the nanoSQUID, as
                      well as the current–phase relationship in the nanobridge
                      JJs, were performed according to Ginzburg–Landau equations
                      on one-dimensional and two-dimensional grids. Bulk
                      micromachining of the Si cantilever was performed using
                      reactive ion etching with SF6 gas through masks of nLOF 2020
                      photoresist from the front side and a quartz shadow mask
                      from the back side of the substrate. An etch rate of 6
                      µmmin−1 for Si was achieved for a power of 300 W of the
                      inductively coupled SF6 plasma. The nanoSQUIDs exhibited
                      non-hysteretic current–voltage characteristics on the
                      cantilever. The estimated spin sensitivity of 48 µB
                      (√Hz)−1 is sufficient for use of such a nanoSQUID as a
                      magnetic field sensor for studying nanoscale objects, with a
                      projected total distance to the object of below 100 nm.},
      cin          = {PGI-5 / ER-C-1},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-5-20110106 / I:(DE-Juel1)ER-C-1-20170209},
      pnm          = {535 - Materials Information Discovery (POF4-535)},
      pid          = {G:(DE-HGF)POF4-535},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000614065000001},
      doi          = {10.1088/1361-6668/abda5c},
      url          = {https://juser.fz-juelich.de/record/890422},
}