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@ARTICLE{Faley:890468,
      author       = {Faley, Michael and Liu, Yuchen and Dunin-Borkowski, Rafal},
      title        = {{T}itanium nitride as a new prospective material for
                      nano{SQUID}s andsuperconducting nanobridge electronics},
      journal      = {Nanomaterials},
      volume       = {11},
      number       = {12},
      issn         = {2079-4991},
      address      = {Basel},
      publisher    = {MDPI},
      reportid     = {FZJ-2021-00981},
      pages        = {466},
      year         = {2021},
      abstract     = {Nanobridge Josephson junctions and nanometer-scale
                      superconducting quantum interference devices (nanoSQUIDs)
                      based on titanium nitride (TiN) thin films are described.
                      The TiN films have a room temperature resistivity of ~15
                      µΩ·cm, a superconducting transition temperature Tc of up
                      to 5.3 K and a coherence length ξ(4.2 K) of ~105 nm. They
                      were deposited using pulsed DC magnetron sputtering from a
                      stoichiometric TiN target onto Si (100) substrates that were
                      heated to 800 °C. Electron beam lithography and highly
                      selective reactive ion etching were used to fabricate
                      nanoSQUIDs with 20-nm-wide nanobridge Josephson junctions of
                      variable thickness. X-ray and high-resolution electron
                      microscopy studies were performed. Non-hysteretic I(V)
                      characteristics of the nanobridges and nanoSQUIDs, as well
                      as peak-to-peak modulations of up to 17 µV in the V(B)
                      characteristics of the nanoSQUIDs, were measured at 4.2 K.
                      The technology offers prospects for superconducting
                      electronics based on nanobridge Josephson junctions
                      operating within the framework of the Ginzburg–Landau
                      theory at 4.2 K.},
      cin          = {PGI-5},
      ddc          = {540},
      cid          = {I:(DE-Juel1)PGI-5-20110106},
      pnm          = {535 - Materials Information Discovery (POF4-535)},
      pid          = {G:(DE-HGF)POF4-535},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {33673042},
      UT           = {WOS:000622922700001},
      doi          = {10.3390/nano11020466},
      url          = {https://juser.fz-juelich.de/record/890468},
}