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@MASTERSTHESIS{Wu:890705,
author = {Wu, Doudou},
othercontributors = {Lepsa, Mihail Ion},
title = {{MBE} growth and characterization of {I}n{A}s based
core-shell nanowire arrays},
school = {RWTH Aachen},
type = {Masterarbeit},
address = {Jülich},
publisher = {Forschungszentrum Jülich},
reportid = {FZJ-2021-01138},
pages = {82 p.},
year = {2021},
note = {Masterarbeit, RWTH Aachen, 2020},
abstract = {Among III-V compound semiconductor nanowires, InAs
nanowires have high electronmobility which make them
suitable for low power field-effect transistors. The Fermi
levelpinning above its conduction band minimum results in
easy fabrication of ohmic contacts.However, due to the large
surface-to-volume ratio of nanowires, the surface states
canhave impact on the electrical property of InAs nanowires
and therefore the influence ofpassivation is interesting to
be investigated. The first part of this report focuses on
themolecular beam epitaxy (MBE) growth of InAs nanowire
arrays on prepatterned Si(111)substrates. Using a new
in-situ Ga droplet assisted substrate preparation, a
highreproducibility of the growth results with high nanowire
yield is achieved. Afterwards, thein-situ passivation of
InAs nanowire by Al2O3 shell using atomic layer deposition
(ALD) issuccessfully realized. In addition, the MBE growth
of InAs-Al0.6Ga0.4Sb core-shellnanowire is studied and the
growth rate of AlGaSb shell is estimated. The second part
isrelated to the fabrication of InAs nanowire-array based
device using HSQ as planarizationlayer. After the
fabrication, each nanowire array as a whole is connected by
top andbottom electrodes vertically. The third part contains
the DC electrical characterization ofthe InAs nanowire-array
based devices at room temperature. The comparison betweenthe
resistivity of unpassivated and Al2O3 passivated InAs
nanowire arrays shows that thelatter is lower demonstrating
the benefit demonstrating the benefit of passivation.},
cin = {PGI-9},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {522 - Quantum Computing (POF4-522)},
pid = {G:(DE-HGF)POF4-522},
typ = {PUB:(DE-HGF)19},
url = {https://juser.fz-juelich.de/record/890705},
}