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@ARTICLE{MacArthur:891572,
      author       = {MacArthur, Katherine E. and Yankovich, Andrew B. and
                      Béché, Armand and Luysberg, Martina and Brown, Hamish G.
                      and Findlay, Scott D. and Heggen, Marc and Allen, Leslie J.},
      title        = {{O}ptimizing {E}xperimental {C}onditions for {A}ccurate
                      {Q}uantitative {E}nergy-{D}ispersive {X}-ray {A}nalysis of
                      {I}nterfaces at the {A}tomic {S}cale},
      journal      = {Microscopy and microanalysis},
      volume       = {27},
      number       = {3},
      issn         = {1431-9276},
      address      = {New York, NY},
      publisher    = {Cambridge University Press},
      reportid     = {FZJ-2021-01597},
      pages        = {528},
      year         = {2021},
      abstract     = {The invention of silicon drift detectors has resulted in an
                      unprecedented improvement in detection efficiency for
                      energy-dispersive X-ray (EDX) spectroscopy in the scanning
                      transmission electron microscope. The result is numerous
                      beautiful atomic-scale maps, which provide insights into the
                      internal structure of a variety of materials. However, the
                      task still remains to understand exactly where the X-ray
                      signal comes from and how accurately it can be quantified.
                      Unfortunately, when crystals are aligned with a low-order
                      zone axis parallel to the incident beam direction, as is
                      necessary for atomic-resolution imaging, the electron beam
                      channels. When the beam becomes localized in this way, the
                      relationship between the concentration of a particular
                      element and its spectroscopic X-ray signal is generally
                      nonlinear. Here, we discuss the combined effect of both
                      spatial integration and sample tilt for ameliorating the
                      effects of channeling and improving the accuracy of EDX
                      quantification. Both simulations and experimental results
                      will be presented for a perovskite-based oxide interface. We
                      examine how the scattering and spreading of the electron
                      beam can lead to erroneous interpretation of interface
                      compositions, and what approaches can be made to improve our
                      understanding of the underlying atomic structure.},
      cin          = {PGI-5 / ER-C-1},
      ddc          = {500},
      cid          = {I:(DE-Juel1)PGI-5-20110106 / I:(DE-Juel1)ER-C-1-20170209},
      pnm          = {535 - Materials Information Discovery (POF4-535) / DFG
                      project 257727131 - Nanoskalige Pt
                      Legierungselektrokatalysatoren mit definierter Morphologie:
                      Synthese, Electrochemische Analyse, und ex-situ/in-situ
                      Transmissionselektronenmikroskopische (TEM) Studien
                      (257727131)},
      pid          = {G:(DE-HGF)POF4-535 / G:(GEPRIS)257727131},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {33843542},
      UT           = {WOS:000664532400007},
      doi          = {10.1017/S1431927621000246},
      url          = {https://juser.fz-juelich.de/record/891572},
}