%0 Conference Paper
%A Massabuau, Fabien
%A Roberts, J W.
%A Nicol, D.
%A Edwards, P R.
%A McLelland, M.
%A Dallas, G L.
%A Hunter, D A.
%A Nicolson, E A.
%A Jarman, J C.
%A Kovacs, Andras
%A Martin, Manfred
%A Oliver, R A.
%A Chalker, P R.
%Y Teherani, Ferechteh H.
%Y Look, David C.
%Y Rogers, David J.
%T Progress in atomic layer deposited [alpha]-Ga2O3 materials and solar-blind detectors
%M FZJ-2021-01757
%P 116870Q1-8
%D 2021
%B Oxide-based Materials and Devices XII
%C 6 Mar 2021 - 12 Mar 2021, Online Only (United States)
Y2 6 Mar 2021 - 12 Mar 2021
M2 Online Only, United States
%F PUB:(DE-HGF)8
%9 Contribution to a conference proceedings
%R 10.1117/12.2588729
%U https://juser.fz-juelich.de/record/891834