000891834 001__ 891834
000891834 005__ 20210623133502.0
000891834 0247_ $$2doi$$a10.1117/12.2588729
000891834 0247_ $$2ISSN$$a0022-7722
000891834 0247_ $$2ISSN$$a1447-073X
000891834 0247_ $$2ISSN$$a1447-6959
000891834 0247_ $$2Handle$$a2128/27632
000891834 0247_ $$2altmetric$$aaltmetric:101535096
000891834 037__ $$aFZJ-2021-01757
000891834 041__ $$aEnglish
000891834 082__ $$a610
000891834 1001_ $$0P:(DE-HGF)0$$aMassabuau, Fabien$$b0$$eCorresponding author
000891834 1112_ $$aOxide-based Materials and Devices XII$$cOnline Only$$d2021-03-06 - 2021-03-12$$wUnited States
000891834 245__ $$aProgress in atomic layer deposited [alpha]-Ga2O3 materials and solar-blind detectors
000891834 260__ $$c2021
000891834 300__ $$a116870Q1-8
000891834 3367_ $$2ORCID$$aCONFERENCE_PAPER
000891834 3367_ $$033$$2EndNote$$aConference Paper
000891834 3367_ $$2BibTeX$$aINPROCEEDINGS
000891834 3367_ $$2DRIVER$$aconferenceObject
000891834 3367_ $$2DataCite$$aOutput Types/Conference Paper
000891834 3367_ $$0PUB:(DE-HGF)8$$2PUB:(DE-HGF)$$aContribution to a conference proceedings$$bcontrib$$mcontrib$$s1618559938_20100
000891834 536__ $$0G:(DE-HGF)POF4-535$$a535 - Materials Information Discovery (POF4-535)$$cPOF4-535$$fPOF IV$$x0
000891834 536__ $$0G:(EU-Grant)823717$$aESTEEM3 - Enabling Science and Technology through European Electron Microscopy (823717)$$c823717$$fH2020-INFRAIA-2018-1$$x1
000891834 588__ $$aDataset connected to CrossRef Conference
000891834 7001_ $$0P:(DE-HGF)0$$aRoberts, J W.$$b1
000891834 7001_ $$0P:(DE-HGF)0$$aNicol, D.$$b2
000891834 7001_ $$0P:(DE-HGF)0$$aEdwards, P R.$$b3
000891834 7001_ $$0P:(DE-HGF)0$$aMcLelland, M.$$b4
000891834 7001_ $$0P:(DE-HGF)0$$aDallas, G L.$$b5
000891834 7001_ $$0P:(DE-HGF)0$$aHunter, D A.$$b6
000891834 7001_ $$0P:(DE-HGF)0$$aNicolson, E A.$$b7
000891834 7001_ $$0P:(DE-HGF)0$$aJarman, J C.$$b8
000891834 7001_ $$0P:(DE-Juel1)144926$$aKovacs, Andras$$b9$$ufzj
000891834 7001_ $$0P:(DE-Juel1)186697$$aMartin, Manfred$$b10$$ufzj
000891834 7001_ $$0P:(DE-HGF)0$$aOliver, R A.$$b11
000891834 7001_ $$0P:(DE-HGF)0$$aChalker, P R.$$b12
000891834 7001_ $$0P:(DE-HGF)0$$aTeherani, Ferechteh H.$$b13$$eEditor
000891834 7001_ $$0P:(DE-HGF)0$$aLook, David C.$$b14$$eEditor
000891834 7001_ $$0P:(DE-HGF)0$$aRogers, David J.$$b15$$eEditor
000891834 773__ $$a10.1117/12.2588729
000891834 8564_ $$uhttps://juser.fz-juelich.de/record/891834/files/1-Massabuau_SPIE.pdf$$yOpenAccess
000891834 909CO $$ooai:juser.fz-juelich.de:891834$$pdnbdelivery$$pec_fundedresources$$pVDB$$pdriver$$popen_access$$popenaire
000891834 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)144926$$aForschungszentrum Jülich$$b9$$kFZJ
000891834 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)186697$$aForschungszentrum Jülich$$b10$$kFZJ
000891834 9130_ $$0G:(DE-HGF)POF3-143$$1G:(DE-HGF)POF3-140$$2G:(DE-HGF)POF3-100$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bEnergie$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Configuration-Based Phenomena$$x0
000891834 9131_ $$0G:(DE-HGF)POF4-535$$1G:(DE-HGF)POF4-530$$2G:(DE-HGF)POF4-500$$3G:(DE-HGF)POF4$$4G:(DE-HGF)POF$$aDE-HGF$$bKey Technologies$$lMaterials Systems Engineering$$vMaterials Information Discovery$$x0
000891834 9141_ $$y2021
000891834 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS
000891834 915__ $$0StatID:(DE-HGF)1030$$2StatID$$aDBCoverage$$bCurrent Contents - Life Sciences
000891834 915__ $$0StatID:(DE-HGF)0600$$2StatID$$aDBCoverage$$bEbsco Academic Search
000891834 915__ $$0StatID:(DE-HGF)1040$$2StatID$$aDBCoverage$$bZoological Record
000891834 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bANAT SCI INT : 2015
000891834 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection
000891834 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded
000891834 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5
000891834 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess
000891834 915__ $$0StatID:(DE-HGF)0030$$2StatID$$aPeer Review$$bASC
000891834 915__ $$0StatID:(DE-HGF)0310$$2StatID$$aDBCoverage$$bNCBI Molecular Biology Database
000891834 915__ $$0StatID:(DE-HGF)1050$$2StatID$$aDBCoverage$$bBIOSIS Previews
000891834 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline
000891834 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bThomson Reuters Master Journal List
000891834 920__ $$lyes
000891834 9201_ $$0I:(DE-Juel1)ER-C-1-20170209$$kER-C-1$$lPhysik Nanoskaliger Systeme$$x0
000891834 980__ $$acontrib
000891834 980__ $$aVDB
000891834 980__ $$aUNRESTRICTED
000891834 980__ $$aI:(DE-Juel1)ER-C-1-20170209
000891834 9801_ $$aFullTexts