TY  - CONF
AU  - Massabuau, Fabien
AU  - Roberts, J W.
AU  - Nicol, D.
AU  - Edwards, P R.
AU  - McLelland, M.
AU  - Dallas, G L.
AU  - Hunter, D A.
AU  - Nicolson, E A.
AU  - Jarman, J C.
AU  - Kovacs, Andras
AU  - Martin, Manfred
AU  - Oliver, R A.
AU  - Chalker, P R.
A3  - Teherani, Ferechteh H.
A3  - Look, David C.
A3  - Rogers, David J.
TI  - Progress in atomic layer deposited [alpha]-Ga2O3 materials and solar-blind detectors
M1  - FZJ-2021-01757
SP  - 116870Q1-8
PY  - 2021
T2  - Oxide-based Materials and Devices XII
CY  - 6 Mar 2021 - 12 Mar 2021, Online Only (United States)
Y2  - 6 Mar 2021 - 12 Mar 2021
M2  - Online Only, United States
LB  - PUB:(DE-HGF)8
DO  - DOI:10.1117/12.2588729
UR  - https://juser.fz-juelich.de/record/891834
ER  -