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@INPROCEEDINGS{Massabuau:891834,
      author       = {Massabuau, Fabien and Roberts, J W. and Nicol, D. and
                      Edwards, P R. and McLelland, M. and Dallas, G L. and Hunter,
                      D A. and Nicolson, E A. and Jarman, J C. and Kovacs, Andras
                      and Martin, Manfred and Oliver, R A. and Chalker, P R.},
      editor       = {Teherani, Ferechteh H. and Look, David C. and Rogers, David
                      J.},
      title        = {{P}rogress in atomic layer deposited [alpha]-{G}a2{O}3
                      materials and solar-blind detectors},
      reportid     = {FZJ-2021-01757},
      pages        = {116870Q1-8},
      year         = {2021},
      month         = {Mar},
      date          = {2021-03-06},
      organization  = {Oxide-based Materials and Devices XII,
                       Online Only (United States), 6 Mar 2021
                       - 12 Mar 2021},
      cin          = {ER-C-1},
      ddc          = {610},
      cid          = {I:(DE-Juel1)ER-C-1-20170209},
      pnm          = {535 - Materials Information Discovery (POF4-535) / ESTEEM3
                      - Enabling Science and Technology through European Electron
                      Microscopy (823717)},
      pid          = {G:(DE-HGF)POF4-535 / G:(EU-Grant)823717},
      typ          = {PUB:(DE-HGF)8},
      doi          = {10.1117/12.2588729},
      url          = {https://juser.fz-juelich.de/record/891834},
}