%0 Patent
%A Lerche, Christoph
%A Berneking, Arne
%A Shah, N. J.
%T [DE] SIPM-SENSORCHIP[EN] SIPM SENSOR CHIP[FR] PUCE DE CAPTEUR DE PHOTOMULTIPLICATEUR EN SILICIUM
%M FZJ-2021-02014
%@ EP3394640B1
%D 2021
%F PUB:(DE-HGF)23
%9 Patent
%N EP3394640B1
%U https://juser.fz-juelich.de/record/892346