%0 Journal Article
%A Lobe, Sandra
%A Bauer, Alexander
%A Uhlenbruck, Sven
%A Fattakhova-Rohlfing, Dina
%T Physical Vapor Deposition in Solid‐State Battery Development: From Materials to Devices
%J Advanced science
%V 8
%N 11
%@ 2198-3844
%C Weinheim
%I Wiley-VCH
%M FZJ-2021-02562
%P 2002044 -
%D 2021
%F PUB:(DE-HGF)16
%9 Journal Article
%$ 34105301
%U <Go to ISI:>//WOS:000630601000001
%R 10.1002/advs.202002044
%U https://juser.fz-juelich.de/record/893104