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@ARTICLE{Sankaran:893153,
author = {Sankaran, Kiroubanand and Moors, Kristof and Tőkei, Zsolt
and Adelmann, Christoph and Pourtois, Geoffrey},
title = {{A}b initio screening of metallic {MAX} ceramics for
advanced interconnect applications},
journal = {Physical review materials},
volume = {5},
number = {5},
issn = {2475-9953},
address = {College Park, MD},
publisher = {APS},
reportid = {FZJ-2021-02598},
pages = {056002},
year = {2021},
abstract = {The potential of a wide range of layered ternary carbide
and nitride Mn+1AXn [an early transition metal (M), an
element of columns 13 or 14 of the periodic table (A), and
either C or N (X)] phases as conductors in interconnect
metal lines in advanced complementary
metal-oxide-semiconductor (CMOS) technology nodes has been
evaluated using automated first-principles simulations based
on density-functional theory. The resistivity scaling
potential of these compounds, i.e., the expected sensitivity
of their resistivity to reduced line dimensions, has been
benchmarked against Cu and Ru by evaluating their transport
properties within a semiclassical transport formalism. In
addition, their cohesive energy has been assessed as a proxy
for the resistance against electromigration and the need for
diffusion barriers. The results indicate that numerous MAX
phases show promise as conductors in interconnects of
advanced CMOS technology nodes.},
cin = {PGI-9},
ddc = {530},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {522 - Quantum Computing (POF4-522)},
pid = {G:(DE-HGF)POF4-522},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000655936200005},
doi = {10.1103/PhysRevMaterials.5.056002},
url = {https://juser.fz-juelich.de/record/893153},
}