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@ARTICLE{Sankaran:893153,
      author       = {Sankaran, Kiroubanand and Moors, Kristof and Tőkei, Zsolt
                      and Adelmann, Christoph and Pourtois, Geoffrey},
      title        = {{A}b initio screening of metallic {MAX} ceramics for
                      advanced interconnect applications},
      journal      = {Physical review materials},
      volume       = {5},
      number       = {5},
      issn         = {2475-9953},
      address      = {College Park, MD},
      publisher    = {APS},
      reportid     = {FZJ-2021-02598},
      pages        = {056002},
      year         = {2021},
      abstract     = {The potential of a wide range of layered ternary carbide
                      and nitride Mn+1AXn [an early transition metal (M), an
                      element of columns 13 or 14 of the periodic table (A), and
                      either C or N (X)] phases as conductors in interconnect
                      metal lines in advanced complementary
                      metal-oxide-semiconductor (CMOS) technology nodes has been
                      evaluated using automated first-principles simulations based
                      on density-functional theory. The resistivity scaling
                      potential of these compounds, i.e., the expected sensitivity
                      of their resistivity to reduced line dimensions, has been
                      benchmarked against Cu and Ru by evaluating their transport
                      properties within a semiclassical transport formalism. In
                      addition, their cohesive energy has been assessed as a proxy
                      for the resistance against electromigration and the need for
                      diffusion barriers. The results indicate that numerous MAX
                      phases show promise as conductors in interconnects of
                      advanced CMOS technology nodes.},
      cin          = {PGI-9},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {522 - Quantum Computing (POF4-522)},
      pid          = {G:(DE-HGF)POF4-522},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000655936200005},
      doi          = {10.1103/PhysRevMaterials.5.056002},
      url          = {https://juser.fz-juelich.de/record/893153},
}