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@ARTICLE{Grieb:893875,
      author       = {Grieb, Tim and Krause, Florian F. and Müller-Caspary, Knut
                      and Firoozabadi, Saleh and Mahr, Christoph and Schowalter,
                      Marco and Beyer, Andreas and Oppermann, Oliver and Volz,
                      Kerstin and Rosenauer, Andreas},
      title        = {{A}ngle-resolved {STEM} using an iris aperture:
                      {S}cattering contributions and sources of error for the
                      quantitative analysis in {S}i},
      journal      = {Ultramicroscopy},
      volume       = {221},
      issn         = {0304-3991},
      address      = {Amsterdam},
      publisher    = {Elsevier Science},
      reportid     = {FZJ-2021-02887},
      pages        = {113175 -},
      year         = {2021},
      abstract     = {The angle-resolved electron scattering is investigated in
                      scanning-transmission electron microscopy (STEM) using a
                      motorised iris aperture placed above a conventional annular
                      detector. The electron intensity scattered into various
                      angle ranges is compared with simulations that were carried
                      out in the frozen-lattice approximation. As figure of merit
                      for the agreement of experiment and simulation we evaluate
                      the specimen thickness which is compared with the thickness
                      obtained from position-averaged convergent beam electron
                      diffraction (PACBED). We find deviations whose strengths
                      depend on the angular range of the detected electrons. As
                      possible sources of error we investigate, for example, the
                      influences of amorphous surface layers, inelastic scattering
                      (plasmon excitation), phonon-correlation within the
                      frozen-lattice approach, and distortions in the diffraction
                      plane of the microscope. The evaluation is performed for
                      four experimental thicknesses and two angle-resolved STEM
                      series under different camera lengths. The results clearly
                      show that especially for scattering angles below 50 mrad, it
                      is mandatory that the simulations take scattering effects
                      into account which are usually neglected for simulating
                      high-angle scattering. Most influences predominantly affect
                      the low-angle range, but also high scattering angles can be
                      affected (e.g. by amorphous surface covering).},
      cin          = {ER-C-1},
      ddc          = {570},
      cid          = {I:(DE-Juel1)ER-C-1-20170209},
      pnm          = {5351 - Platform for Correlative, In Situ and Operando
                      Characterization (POF4-535) / moreSTEM - Momentum-resolved
                      Scanning Transmission Electron Microscopy (VH-NG-1317)},
      pid          = {G:(DE-HGF)POF4-5351 / G:(DE-HGF)VH-NG-1317},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {33383361},
      UT           = {WOS:000613507200002},
      doi          = {10.1016/j.ultramic.2020.113175},
      url          = {https://juser.fz-juelich.de/record/893875},
}