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@ARTICLE{Mahr:893877,
author = {Mahr, Christoph and Müller-Caspary, Knut and Grieb, Tim
and Krause, Florian and Schowalter, Marco and Rosenauer,
Andreas},
title = {{A}ccurate measurement of strain at interfaces in
4{D}-{STEM}: {A} comparison of various methods},
journal = {Ultramicroscopy},
volume = {221},
issn = {0304-3991},
address = {Amsterdam},
publisher = {Elsevier Science},
reportid = {FZJ-2021-02889},
pages = {113196 -},
year = {2021},
abstract = {Strain analysis by nano-beam electron diffraction allows
for measurements of strain with nanometre resolution in a
large field of view. This is done by evaluating distances
between diffraction discs in diffraction patterns acquired
while a focussed electron beam is scanned across the sample
in a transmission electron microscope. The bottleneck of
this method is a precise determination of diffraction disc
positions, which suffers from the inner structure of the
discs caused by dynamical diffraction. Electron beam
precession is a tool that solves this problem but it is not
commonly available in every microscope. Without precession
significant progress has been reported recently by using
patterned condenser apertures. The pattern of the aperture
is reproduced in patterns of the diffraction discs allowing
for a more precise position determination. In this report
the accuracy of measured strain profiles using patterned
apertures is investigated by evaluation of realistic
simulations. This is done especially at interfaces between
regions with different lattice plane spacing. It is found by
evaluation of the simulations that measured strain profiles
are more blurred and hence the accuracy at the interface is
worse the more patterns are imprinted to the condenser
aperture. An explanation of this effect is given and as a
proof of principle a solution to this problem is provided
applying geometric phase analysis ptychography},
cin = {ER-C-1},
ddc = {570},
cid = {I:(DE-Juel1)ER-C-1-20170209},
pnm = {5351 - Platform for Correlative, In Situ and Operando
Characterization (POF4-535) / moreSTEM - Momentum-resolved
Scanning Transmission Electron Microscopy (VH-NG-1317) /
Ptychography 4.0 - Proposal for a pilot project "Information
$\&$ Data Science" (ZT-I-0025)},
pid = {G:(DE-HGF)POF4-5351 / G:(DE-HGF)VH-NG-1317 /
G:(DE-HGF)ZT-I-0025},
typ = {PUB:(DE-HGF)16},
pubmed = {33341079},
UT = {WOS:000612539600004},
doi = {10.1016/j.ultramic.2020.113196},
url = {https://juser.fz-juelich.de/record/893877},
}