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@ARTICLE{Beyer:893892,
author = {Beyer, Andreas and Krause, Florian and Robert, Hoel L. and
Firoozabadi, Saleh and Grieb, Tim and Kükelhan, Pirmin and
Heimes, Damien and Schowalter, Marco and Müller-Caspary,
Knut and Rosenauer, Andreas and Volz, Kerstin},
title = {{I}nfluence of plasmon excitations on atomic-resolution
quantitative 4{D} scanning transmission electron microscopy},
journal = {Scientific reports},
volume = {10},
number = {1},
issn = {2045-2322},
address = {[London]},
publisher = {Macmillan Publishers Limited, part of Springer Nature},
reportid = {FZJ-2021-02904},
pages = {17890},
year = {2020},
abstract = {Scanning transmission electron microscopy (STEM) allows to
gain quantitative information on the atomic-scale structure
and composition of materials, satisfying one of todays major
needs in the development of novel nanoscale devices. The aim
of this study is to quantify the impact of inelastic, i.e.
plasmon excitations (PE), on the angular dependence of STEM
intensities and answer the question whether these
excitations are responsible for a drastic mismatch between
experiments and contemporary image simulations observed at
scattering angles below ∼ 40 mrad. For the two materials
silicon and platinum, the angular dependencies of elastic
and inelastic scattering are investigated. We utilize energy
filtering in two complementary microscopes, which are
representative for the systems used for quantitative STEM,
to form position-averaged diffraction patterns as well as
atomically resolved 4D STEM data sets for different energy
ranges. The resulting five-dimensional data are used to
elucidate the distinct features in real and momentum space
for different energy losses. We find different angular
distributions for the elastic and inelastic scattering,
resulting in an increased low-angle intensity (∼ 10–40
mrad). The ratio of inelastic/elastic scattering increases
with rising sample thickness, while the general shape of the
angular dependency is maintained. Moreover, the ratio
increases with the distance to an atomic column in the
low-angle regime. Since PE are usually neglected in image
simulations, consequently the experimental intensity is
underestimated at these angles, which especially affects
bright field or low-angle annular dark field imaging. The
high-angle regime, however, is unaffected. In addition, we
find negligible impact of inelastic scattering on
first-moment imaging in momentum-resolved STEM, which is
important for STEM techniques to measure internal electric
fields in functional nanostructures. To resolve the
discrepancies between experiment and simulation, we present
an adopted simulation scheme including PE. This study
highlights the necessity to take into account PE to achieve
quantitative agreement between simulation and experiment.
Besides solving the fundamental question of missing physics
in established simulations, this finally allows for the
quantitative evaluation of low-angle scattering, which
contains valuable information about the material
investigated.},
cin = {ER-C-1},
ddc = {600},
cid = {I:(DE-Juel1)ER-C-1-20170209},
pnm = {5351 - Platform for Correlative, In Situ and Operando
Characterization (POF4-535) / moreSTEM - Momentum-resolved
Scanning Transmission Electron Microscopy (VH-NG-1317)},
pid = {G:(DE-HGF)POF4-5351 / G:(DE-HGF)VH-NG-1317},
typ = {PUB:(DE-HGF)16},
pubmed = {33087734},
UT = {WOS:000585143800023},
doi = {10.1038/s41598-020-74434-w},
url = {https://juser.fz-juelich.de/record/893892},
}