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@ARTICLE{Koslowski:902618,
author = {Koslowski, H. R. and Linsmeier, Ch},
title = {{D}erivation of an improved semi-empirical expression for
the re-ionisation background in low energy ion scattering
spectra},
journal = {IOP SciNotes},
volume = {2},
number = {3},
issn = {2633-1357},
address = {[Bristol, UK]},
publisher = {IOP Publishing},
reportid = {FZJ-2021-04413},
pages = {035206 -},
year = {2021},
abstract = {Low energy ion scattering is a technique to detect the
energy of ions which are scattered from a surface. For noble
gas ions, it is predominantly sensitive to the topmost
surface layer due to strong neutralisation processes.
Depending on the combination of projectile ion and target
material, the scattering spectra can exhibit contributions
resulting from multiple scattering processes in deeper
layers when probing ions are re-ionised on the exiting
trajectory. These events cause a pronounced continuum
located toward lower scattering energies with respect to the
direct scattering peak. In a previous work a semi-empirical
formula has been given which allows fitting and derivation
of quantitative information from the measured spectra
[Nelson 1986 J. Vac Sci. Technol. A 4 1567-1569]. Based on
the former work an improved formula is derived which has
less numerical artefacts and is numerically more stable.},
cin = {IEK-4},
ddc = {333.7},
cid = {I:(DE-Juel1)IEK-4-20101013},
pnm = {134 - Plasma-Wand-Wechselwirkung (POF4-134)},
pid = {G:(DE-HGF)POF4-134},
typ = {PUB:(DE-HGF)16},
doi = {10.1088/2633-1357/ac25e8},
url = {https://juser.fz-juelich.de/record/902618},
}