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@ARTICLE{Kindelmann:902641,
      author       = {Kindelmann, Moritz and Weber, Moritz L. and Stamminger,
                      Mark and Buschhaus, Rahel and Wessel, Egbert and Bram,
                      Martin and Guillon, Olivier},
      title        = {{T}he role of fluorination during the physicochemical
                      erosion of yttria in fluorine-based etching plasmas},
      journal      = {Journal of the European Ceramic Society},
      volume       = {42},
      number       = {2},
      issn         = {0955-2219},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {FZJ-2021-04436},
      pages        = {561 - 566},
      year         = {2022},
      abstract     = {A physicochemical mechanism acting between the reactive
                      plasma and the material surface controls the erosion of
                      polycrystalline ceramics in fluorine containing etching
                      plasmas. In this study, a Y2O3/YOF composite was exposed to
                      a fluorine etching plasma. Relocalization enables the direct
                      correlation of crystalline orientation with material
                      response. Our study reveals an orientation dependent surface
                      fluorination of Y2O3, which controls the etching resistance
                      and morphology formation. Orientations near the low index
                      planes (001), (010) and (100) exhibit the lowest stability
                      due to a homogeneous surface reaction. The presented results
                      help to extend the mechanistic understanding of the
                      plasma-material interaction of Y2O3.},
      cin          = {PGI-7 / ER-C-2 / IEF-1 / IEK-2},
      ddc          = {660},
      cid          = {I:(DE-Juel1)PGI-7-20110106 / I:(DE-Juel1)ER-C-2-20170209 /
                      I:(DE-Juel1)VDB809 / I:(DE-Juel1)IEK-2-20101013},
      pnm          = {5233 - Memristive Materials and Devices (POF4-523) / 5353 -
                      Understanding the Structural and Functional Behavior of
                      Solid State Systems (POF4-535)},
      pid          = {G:(DE-HGF)POF4-5233 / G:(DE-HGF)POF4-5353},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000722274800003},
      doi          = {10.1016/j.jeurceramsoc.2021.10.061},
      url          = {https://juser.fz-juelich.de/record/902641},
}